Laser Technology

INTELLIVATION Laser Patterning of Sputtered Coatings

The demand for high-performance devices with enhanced functionalities, such as mechanical flexibility continues to grow. Materials with unique electrical and mechanical properties are used for 2D flexible devices such as sensors for microelectronics, biomedical devices and sensors. Deposition of sputtered layers with laser processing using roll-to-roll fabrication are ideal for high volume manufacturing.

Sputtered coatings are the foundation for building functional devices, these layers are deposited on flexible substrates using the Intellivation R2R Lab system. Laser patterning of the sputtered layers adds the ability to create discrete devices, circuits, and other types of discontinuous features in the manufacturing process and offers a direct, efficient way to create and define patterns on sputtered coatings including changes in geometry by redefining the path of the laser. Using these two techniques in combination provides unique capabilities, particularly during product development for flexible 2D devices while providing consistent feature size and edge quality.

Laser patterning involves using a laser beam to selectively remove or modify specific areas of the deposited film and enables the generation of intricate patterns with submicron-level precision. Control and precision of the laser is critical for creating and modifying each layer for the specific end use requirements. The non-contact nature of laser patterning reduces the risk of contamination and damage to the underlying substrate, making it particularly suitable for delicate 2D materials. This technique provides the ability to develop and then validate a design and process in small volumes and then easily transfer to large area roll-to-roll production without changes to the laser processing equipment.

Deposition of the conductive material onto the substrate was done with Intellivation’s R2R thin film vacuum deposition Lab coater that is available for product and process development. The conductive coating is then laser patterned to match the desired level of hydrophobicity through morphology between distinct pattern structures, allowing control of the application of selective layers responsible for molecule detection. Subsequently, specific areas are conditioned to allow for a narrow continuous 2D semiconducting material; this is accomplished by depositing the semiconductor material on the entire patterned substrate and then patterning of isolating regions to crystallize them for interfacing with subsequent layers. Once the substrate, layer stacks and laser variables are optimized, the next phase is to scale these devices to large area R2R processing.

Integrated R2R Platform for Development and Production of High-Tech Flexible Electronics

Mike Simmons | President and CEO, INTELLIVATION LLC

The need for high volume flexible, functional devices for sensor, energy, optical, biomedical, and aerospace applications requires the ability to integrate new product and process controls into roll-to-roll solutions for vacuum coating. Key factors in equipment selection include powerful automation, modular equipment design, deposition source technology, power supply selection, substrate handling e.g. transport, temperature, surface treatment and in-situ monitoring, are all critical for providing solutions for the production of flexible devices. Modern flexible electronic sensors can be manufactured from coated thin films using laser patterning of the vacuum deposited layers. This technique can also be used to control surface morphology of individual layers to provide functionalities catered to the end use. The ability to provide unique comprehensive solutions for all these requirements in a single R2R vacuum web coating system is driving production of the next generation of light-weight flexible devices with high yield and the best performance for high volume production.

Benefits of Laser Patterning of Sputtered Coatings

Transitioning to laser patterning provides significant improvements for rapid development with the ability to quickly transition to high volume production.

• High Precision
• Scalability
• Repeatability
• Flexibility in Design
• Material development
• Performance optimization
• Reduced Waste
• Speed & Efficiency
• Cost Savings (Development & Manufacturing)

Impact of Surface Morphology

Surface morphology plays a crucial role in determining the continuity and adhesion of successive sputtered 2D thin film
layers.

• Careful tuning allows for adhesion of continuous thin films down to 3 nm thick

• Surface roughness can be tune for hydrophilic and hydrophobic responses

What are your patterning needs?