R2R Series Vacuum Web Coating Systems
The Intellivation R2R Series roll to roll web coating systems feature substrate pretreatment, four to five configurable process zones, a temperature controlled coating drum and a state of the art control system. Process zones can be configured for planar sputtering magnetrons, rotary sputter magnetrons, evaporation (thermal or e-beam) and plasma surface treatments like glow discharge and anode layer ion source. Designed for roll to roll web coating and roll to roll processing of flexible substrates including metal foils, polymer webs, textiles, flexible glass, and flexible ceramics, with coated widths up to 500mm. The R2R series has proven itself in such applications as metallization, security films, optical coatings, flexible electronics, barrier films, medical devices, batteries and other leading edge roll to roll technologies.
We invite you to come to our fully equipped R2R application development laboratory and try your product idea on our R2R coater.
The powerful yet intuitive control system includes data logging and recipe based processing. A suite of optional in-situ metrology techniques provide for quality assurance of films and for rapid development cycles. The compact design of the R2R series maximizes efficiency by delivering high throughput in a small footprint. Cost of ownership is further reduced through excellent ease of access for operation and maintenance and reduced utility costs as a result of a proprietary coating drum roller design.
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R2R SPEC SHEET: Get instant access
Roll to Roll Web Coating System:
R2R Series Features
- Web Widths from 50 mm to 1,000 mm
- Plastic & Metal Foils , Textiles, Flexible Glass & Ceramics
- Industry Leading Compact Ergonomic Design
- Versatile Web Paths
- Web forward and backward enables multi-layer coating designs
- Non-contact front surface web paths for defect free surfaces
- Drum mode for coating straps or individual substrates
- Interleaf removal optional
- Up to 4 Configurable Deposition Zones
- Evaporation (Thermal or E-beam)
- Bipolar Pulsed, AC or DC Planar Sputter Magnetrons
- BiPolar Pulsed, AC or DC Rotary Sputter Magnetrons
- Plasma surface treatment options, in addition to Pre- or Post- Treatment
- Optional depositions Sources e.g. HIPIMS, PECVD,
Thin Film Applications
- Flexible Circuits
- Optical & Display
- Thin film battery
- High temperature Superconductors
- Medical Devices
- Tribological (Wear) Coatings
- Metal foils
- Flexible glass
- Flexible ceramics
Roll to Roll Web Coaters: Models at a Glance
R2R Series Ergonomic Design
Deposition Bulkhead is Retractable & Fully Accessible
Provides unrestricted access for:
- Target Changes (30 minutes or less per zone, planar or rotary sputter target)
- Quick Shield Changes, no Open Water Connection
- No water connections for planars
R2R Series Industry Leading Facility Compact Footprint
With laboratory and Industrial space at a premium for many companies the area occupied by the R2R Series is remarkably small:
- R2R-050 25 ft2 (2.2 m2)
- R2R-150 & R2R 330 60 ft2 (5.4 m2)
- R2R-500 110 ft2 (9.9 m2)
Provides flexibility for locating equipment in existing facilities
R2R Series Controls
Versatile Web Paths
- Web movement forward and backward enables complex multi-layer thin film coatings
- Non-contact front surface web path for defect free web handling
- Interleaf removal and application for sensitive surfaces
- Drum mode for coating straps or individual substrates
- Web paths are configurable with straight forward machine configuration changes.
- All machines are pre provisioned for roller additions and alignment
- Provides flexibility for developing new products and/or flexible manufacturing
- Precise Tension Control
- Enables coating of challenging substrates like flexible ceramics and glass
- Precision coatings for large DOE’s
- Web position recorded and monitored to sub millimeter precision
- Three zone tension control: payout, coating zone, take-up
- HMI front panel changes with installed configuration making integration for the operator seamless
Web speed and position monitoring
- Permits precise alignment of coating positions on web
- Allows for a wide ranger of recipes in singe campaign
A plasma is generated over the target surface by biasing the target negatively with respect to an anode. A magnetic field confines the plasma adjacent to the surface of the target. Positive ions (usually argon) from the plasma strike the negatively biased target and eject atoms of the target material that condense on the substrate to make a thin film.
Dual Magnetron Sputtering
Two magnetron targets are connected to a power supply that can oscillate the polarity of each target. The polarity typically oscillates at frequencies from 5 kHz and 150 kHz. This is used when sputtering oxide or nitride dielectric films to prevent anode loss.
Sputtering deposition technology is utilized when high quality dense films are required. INTELLIVATION can match the magnetron type and power supply to meet your thin film requirements.
E-beam Evaporation (electron beam)
A highly-charged electron beam evaporates the positively charged target material. The evaporated flux of atoms/molecules condense on the substrate to create the thin film.
A resistive heat source heats the target material increasing its vapor pressure. The evaporated atoms/molecules condense on the substrate forming the thin film.
Evaporation deposition technology is utilized when high rate deposition is required. INTELLIVATION can match the evaporation technology to meet your thin film requirements
A plasma is ignited between two tubes by biasing them either with AC, alternating their polarity or biasing them with a DC power supply. A treatment gas is introduced to the plasma and the activated treatment gas interacts with the substrate to affect a chemical change that increases the surface energy of the substrate to improve adhesion.
Anode Layer Source
A plasma is magnetically confined between a slit that acts as a cathode. The plasma confined in the slit creates a beam of positive ions that are repelled by the positive bias of and anode. The energy of the repelled positive ions is controlled by the bias put on the slits by the power supply and the pressure.
Plasma treaters are utilized before the deposition zones to treat the surface of the substrate. INTELLIVATION can match the plasma treater technology to meet your thin film requirements.
R2R Series In-Situ Metrology
- Optical Density
- Sheet resistance / conductivity
- Spectral reflectance
- Spectral Transmission
- Quartz Crystal Microbalance (thickness)
- End-point Detection
- Residual Gas Analyzer