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Large Area Roll to Roll Web Coating Systems

Intellivation large area roll to roll web coating systems maximize efficiency, run to run consistency, and product quality in the high-end applications of today such as flexible optical coatings, thin film battery, security coatings, and medical device coatings, to name a few.   The systems feature substrate pretreatment, up to six configurable process zones per coating drum, one to four temperature controlled coating drums, and a state of the art control system. Process zones can be configured for planar sputtering magnetrons, rotary sputter magnetrons, evaporation (thermal or e-beam) and plasma surface treatments like glow discharge and anode layer ion source. Designed for high throughput large area roll to roll thin film coating and roll to roll processing of flexible substrates including metal foils, polymer webs, textiles, flexible glass, and flexible ceramics, with coated widths up to 2,000mm.  Intellivation large area PVD web coating systems are proven in applications such as metallization, security films, optical coatings, flexible electronics, barrier films, medical devices, batteries and other leading edge roll to roll coating technologies. We invite you to come to our fully equipped R2R application development laboratory and try your product idea on our pilot & production scale R2R-330 coater.

The powerful yet intuitive control system includes data logging and recipe based processing. A suite of optional in-situ metrology techniques provide for quality assurance of films and for rapid development cycles. The compact design of the R2R series maximizes efficiency by delivering high throughput in a small footprint.  Cost of ownership is further reduced through excellent ease of access for operation and maintenance and reduced utility costs as a result of a proprietary coating drum roller design.

Large Area Vacuum Web Coating System:

Series Features

  • Web Widths from 500 mm to 2,000 mm
  • Plastic & Metal Foils , Textiles, Flexible Glass
  • Industry Leading Compact Ergonomic Design
  • Versatile Web Paths
    • Web forward and backward enables multi-layer coating designs
    • Non-contact front surface web paths for defect free surfaces
    • Drum mode for coating straps or individual substrates
    • Interleaf removal and application
  • Single and Multi-Drum Web Coating Systems
  • Up to 6 Configurable Deposition Zones Per Drum
    • Evaporation (Thermal or E-beam)
    • AC or DC Planar Sputter Magnetrons
    • AC or DC Rotary Sputter Magnetrons
    • Plasma surface treatment
large area roll to roll vacuum web coating system

Large area roll to roll vacuum web coating system roll stands, shown with interleaving in place.

Thin Film Applications

  • Metallization
  • Flexible Circuits
  • Optical
  • Barrier
  • Decorative
  • Security
  • Magnetic
  • Thin film battery
  • High temperature Superconductors
  • Medical Devices
  • Tribological (Wear) Coatings

Substrates Processed

  • Polymers
  • Metal foils
  • Textiles
  • Nonwovens
  • Flexible glass

Industry Leading Low Ceiling Height

All systems can be installed with ceiling heights below 14’ (4.3m)

Provides flexibility for locating equipment in existing facilities

Industry Leading Facility Compact Footprint

With Industrial space at a premium for many companies the area occupied is remarkably small

  • 1m width    1,000 ft2    (93 m2)
  • 2m width     1,250 ft2    (116 m2)

Provides flexibility for locating equipment in existing facilities

Web Paths

Versatile Web Paths
  • Web movement forward and backward enables complex multi-layer thin film coatings
  • Non-contact front surface web path for defect free web handling
  • Interleaf removal and application for sensitive surfaces
  • Drum mode for coating straps or individual substrates
Web Control
  • Precise Tension Control
  • Enables coating of challenging substrates like flexible glass
Web speed and position monitoring
  • Permits precise alignment of coating positions on web
Web Control / Configuration
  • Web position recorded and monitored to sub millimeter precision
  • 5 zone tension control: payout, coating zone, take-up
  • Web paths are configurable with straight forward machine configuration changes.
    • All machines are pre provisioned for roller additions and alignment
    • Provides flexibility for developing new products and/or flexible manufacturing
  • HMI front panel changes with installed configuration making integration for the operator seamless

Deposition Sources

Thin film sources

  • Glow Discharge Plasma Surface Treater
  • Planar magnetrons
  • Rotary magnetrons
  • Dual Rotary magnetrons
  • Thermal evaporation
  • PECVD, E-beam

Magnetron Sputtering

A plasma is generated over the target surface by biasing the target negatively with respect to an anode.  The magnetic field confines the plasma adjacent to the surface of the target. Positive ions (usually argon) from the plasma strike the negatively biased target and eject atoms of the target material that condense on the substrate to make a thin film.

Dual Magnetron Sputtering

Two magnetron targets are connected to a power supply that can oscillate the polarity of each target. The polarity typically oscillates at frequencies from  5 kHz and 150 kHz.  This is used when sputtering oxide or nitride dielectric films to prevent anode loss.

Sputtering deposition technology is utilized when high quality dense films are required. INTELLIVATION can match the magnetron type and power supply to meet your thin film requirements.

Evaporation Sources

E-beam Evaporation (electron beam)

A highly-charged electron beam evaporates the positively charged target material. The evaporated flux of atoms/molecules condense on the substrate to create the thin film.

 

Thermal Evaporation

A resistive heat source heats the target material increasing its vapor pressure. The evaporated atoms/molecules condense on the substrate forming the thin film.

Evaporation deposition technology is utilized when high rate deposition is required at the sacrifice of some aspects of film quality. INTELLIVATION can match the evaporation technology to meet your thin film requirements.

Plasma Treaters

Glow Discharge

A plasma is ignited between two tubes by biasing them either with AC, alternating their polarity or biasing them with a DC power supply. A treatment gas is introduced to the plasma and the activated treatment gas interacts with the substrate to affect a chemical change that increases the surface energy of the substrate to improve adhesion

 

 

Anode Layer Source

A plasma is magnetically confined between a slit that acts as a cathode. The plasma confined in the slit creates a beam of positive ions that are repelled by the positive bias of and anode. The energy of the repelled positive ions is controlled by the bias put on the slits by the power supply and the pressure.

Plasma treaters are utilized before the deposition zones to treat the surface of the substrate. INTELLIVATION can match the plasma treater technology to meet your thin film requirements.

Roll to Roll Sputtering System In-Situ Metrology

  • Optical Density
  • Sheet resistance / conductivity
  • Spectral reflectance
  • Spectral Transmission
  • Quartz Crystal Microbalance (thickness)
  • End-point Detection
  • Residual Gas Analyzer
  • Others