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Mike Simmons presents A Method for Scaling Dynamic Deposition Rates at the 2017 AIMCAL R2R Conference in Tampa, FL

Oct 18, 2017 | Technical Papers

Intellivation President Mike Simmons presents A Method for Scaling Dynamic Deposition Rates Between Planar to Rotary Magnetrons, and Study of Heat Load Incident Upon Substrate for Each at the 2017 AIMCAL R2R Conference in Tampa, Florida.  The presentation abstract is:

Roll to roll manufacturing of many products utilize planar magnetron sputtering, rotary magnetron sputtering, or a combination thereof. In many cases the films deposited by these methods are applied to thermally sensitive substrates or other thermally sensitive coatings or devices that have been previously applied to those substrates, and oftentimes the motivation is to maximize the rate of deposition while avoiding thermal damage. This paper presents a method to scale target power density between planar and rotary magnetron sputter cathodes in a manner that is predictive of dynamic deposition rates, and presents case study data. The heat load incident upon the substrate is also measured for each technique and is compared, and the relationship between the target power density and the substrate heat load is shown. While the data presented is for a specific hardware set, the characterization methods are applicable to any equipment set and some scalable generalities are shown.

Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2017 AIMCAL R2R Conference in Tampa, Florida

Oct 17, 2017 | Technical Papers

Intellivation President Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2017 AIMCAL R2R Conference in Tampa, Florida.  The presentation abstract is:

Advances in high volume manufacturing technology have led to commercial production of ever-thinner polymer substrates and to the emergence of flexible glass and flexible ceramic substrates, all of which are candidate materials for vacuum web coating processes. Similarly, developments in applications including flexible electronics have led to new and more stringent processing requirements. These include particle management, substrate interleaves, thermal control, and increasingly complex multi-layered products which are often most efficiently produced by using different deposition techniques in a single web coater. In 2014, Intellivation developed the R2R series vacuum web coating tool platform to address these challenges. This paper reviews the modular equipment design and presents case study data from the R2R330 at the Intellivation Application Lab in Fort Collins, Colorado.

October 15-17, 2017

Oct 15, 2017 | Exhibitions

Intellivation exhibits at the 2017 AIMCAL R2R Conference in Tampa, Florida.  Come say hello to learn about the latest in roll to roll vacuum deposition equipment, automation, and processing techniques.  New for 2017, the Intellivation Application Lab is equipped with an R2R330 machine for customer demonstrations and product development.