Intellivation President Mike Simmons presents A Method for Scaling Dynamic Deposition Rates Between Planar to Rotary Magnetrons, and Study of Heat Load Incident Upon Substrate for Each at the 2017 AIMCAL R2R Conference in Tampa, Florida. The presentation abstract is:
Roll to roll manufacturing of many products utilize planar magnetron sputtering, rotary magnetron sputtering, or a combination thereof. In many cases the films deposited by these methods are applied to thermally sensitive substrates or other thermally sensitive coatings or devices that have been previously applied to those substrates, and oftentimes the motivation is to maximize the rate of deposition while avoiding thermal damage. This paper presents a method to scale target power density between planar and rotary magnetron sputter cathodes in a manner that is predictive of dynamic deposition rates, and presents case study data. The heat load incident upon the substrate is also measured for each technique and is compared, and the relationship between the target power density and the substrate heat load is shown. While the data presented is for a specific hardware set, the characterization methods are applicable to any equipment set and some scalable generalities are shown.
Intellivation President Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2017 AIMCAL R2R Conference in Tampa, Florida. The presentation abstract is:
Advances in high volume manufacturing technology have led to commercial production of ever-thinner polymer substrates and to the emergence of flexible glass and flexible ceramic substrates, all of which are candidate materials for vacuum web coating processes. Similarly, developments in applications including flexible electronics have led to new and more stringent processing requirements. These include particle management, substrate interleaves, thermal control, and increasingly complex multi-layered products which are often most efficiently produced by using different deposition techniques in a single web coater. In 2014, Intellivation developed the R2R series vacuum web coating tool platform to address these challenges. This paper reviews the modular equipment design and presents case study data from the R2R330 at the Intellivation Application Lab in Fort Collins, Colorado.
Intellivation exhibits at the 2017 AIMCAL R2R Conference in Tampa, Florida. Come say hello to learn about the latest in roll to roll vacuum deposition equipment, automation, and processing techniques. New for 2017, the Intellivation Application Lab is equipped with an R2R330 machine for customer demonstrations and product development.
Intellivation exhibits at the 2017 Society of Vacuum Coaters TechCon in Providence, Rhode Island. Visit us at booth 404.
Intellivation exhibits at the 38th Annual NCCAVS Equipment Exhibition in San Jose, CA.
Intellivation exhibits at the 2016 AIMCAL Web Coating & Handling Conference in Memphis, Tennesee
Intellivation exhibits at the 2016 Society of Vacuum Coaters TechCon in Indianapolis, IN. Visit us at booth 640.
Intellivation exhibits at the 37th Annual NCCAVS Equipment Exhibition in San Jose, CA.
Intellivation exhibits at the 2015 IDTechEx Printed Electronics USA in Santa Clara, CA Visit us at booth K01.
Intellivation exhibits at the 2015 AIMCAL Web Coating & Handling Conference in Naples, Florida