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Intellivation exhibits at the 40th Annual Northern California Chapter AVS (NCCAVS) Equipment Exhibition in San Jose, California

Intellivation exhibits at the 40th Annual Northern California Chapter AVS (NCCAVS) Equipment Exhibition in San Jose, California. Visit the Intellivation booth to learn more about the latest innovations in roll to roll magnetron sputtering technology and equipment for use in today’s demanding applications including high throughput hybrid flexible electronics manufacturing equipment.

Mike Simmons Presents at the 2018 AIMCAL R2R Conference on Coating Properties Deposited by High Power Impulse Magnetron Sputtering

Intellivation President Mike Simmons and GP Plasma President Frank Papa Present at the 2018 AIMCAL R2R Conference, giving a paper entitled Coating Properties of Cu and TiO2 on Polymer Web Deposited by High Power Impulse Magnetron Sputtering With and Without Positive Voltage Reversal and Pulsed DC

The full abstract of the presentation is:

Improving the coating properties such as sheet resistance for copper and the index of refraction and structure for TiO2 are an important topic for low temperature coating on polymer web. Both types of coatings can be deposited by pulsed DC, but little can be done to influence the material properties as the energy of the deposited species is relatively low (around 5 eV). HIPIMS has been shown to increase both the ion fraction and energy of the sputtered species. Ion fractions range from 10-90% depending on the target material and the energy of both gas and metal ions can reach up to 50eV. By adding a positive voltage reversal pulse adjacent to the negative sputtering pulse, the metal and gas ions can be accelerated towards the substrate to influence the coating properties. This repulsion of ions from the target during the positive reversal pulse also results in an increase in deposition rate of up to 30% over conventional HIPIMS sputtering. In this study, we will examine thermal loading and deposition rate as well as the optical, electrical and morphologic properties of Cu and TiO2. All experiments are carried out on an industrial web coater.

Authors: Frank Papa, Mike Simmons, Ivan Fernandez Martinez

Presenters: Frank Papa, Mike Simmons

Intellivation exhibits at the 2018 Association of International Metalizers, Coaters, and Laminators (AIMCAL) R2R Conference in Phoenix, AZ

Intellivation exhibits at the 2018 Association of International Metalizers, Coaters, and Laminators (AIMCAL) R2R Conference in Phoenix Arizona. Intellivation president Mike Simmons serves as the AIMCAL Vacuum Web Coating committee co-chair to help seek out the best technical papers in emerging technology areas such as thin film batteries, roll to roll optical coatings, flexible electronics manufacturing, large area roll to roll sputter deposition, and flexible medical devices, in order to put on a strong technical program in the vacuum web coating track. Please visit the conference to learn more about these exciting technology areas, and while you are here visit the Intellivation exhibit to learn more about our reel to reel vacuum deposition equipment for Production, Pilot, and R&D, and our on-site thin film coating development laboratory.

Intellivation exhibits at the 2018 Society of Vacuum Coaters TechCon in Orlando, Florida

Intellivation exhibits at the 2018 Society of Vacuum Coaters TechCon in Orlando, Florida.  Come visit us at booth 516 to learn more about the innovative R2R series modular roll to roll vacuum coating equipment line.  Handling substrates including flexible ceramics, ultrathin polymers, metal foils, textiles, and others; and depositing many materials including any conductive material, oxides and nitrides of any conductive material, organic materials, and others, the R2R series is a very powerful platform for use in developing and manufacturing today’s demanding high tech products.

Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2018 FLEX Conference in Monterey, California

Intellivation President Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2018 FLEX Conference in Monterey, California.  The presentation abstract is:

Advances in high volume manufacturing technology have led to commercial production of ever-thinner polymer substrates and to the emergence of flexible glass and flexible ceramic substrates, all of which are candidate materials for vacuum web coating processes. Similarly, developments in applications including flexible electronics have led to new and more stringent processing requirements. These include particle management, substrate interleaves, thermal control, and increasingly complex multi-layered products which are often most efficiently produced by using different deposition techniques in a single web coater. In 2014, Intellivation developed the R2R series vacuum web coating tool platform to address these challenges. This paper reviews the modular equipment design and presents case study data from the R2R330 at the Intellivation Application Lab in Fort Collins, Colorado.

Mike Simmons presents A Method for Scaling Dynamic Deposition Rates at the 2017 AIMCAL R2R Conference in Tampa, FL

Intellivation President Mike Simmons presents A Method for Scaling Dynamic Deposition Rates Between Planar to Rotary Magnetrons, and Study of Heat Load Incident Upon Substrate for Each at the 2017 AIMCAL R2R Conference in Tampa, Florida.  The presentation abstract is:

Roll to roll manufacturing of many products utilize planar magnetron sputtering, rotary magnetron sputtering, or a combination thereof. In many cases the films deposited by these methods are applied to thermally sensitive substrates or other thermally sensitive coatings or devices that have been previously applied to those substrates, and oftentimes the motivation is to maximize the rate of deposition while avoiding thermal damage. This paper presents a method to scale target power density between planar and rotary magnetron sputter cathodes in a manner that is predictive of dynamic deposition rates, and presents case study data. The heat load incident upon the substrate is also measured for each technique and is compared, and the relationship between the target power density and the substrate heat load is shown. While the data presented is for a specific hardware set, the characterization methods are applicable to any equipment set and some scalable generalities are shown.

Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2017 AIMCAL R2R Conference in Tampa, Florida

Intellivation President Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2017 AIMCAL R2R Conference in Tampa, Florida.  The presentation abstract is:

Advances in high volume manufacturing technology have led to commercial production of ever-thinner polymer substrates and to the emergence of flexible glass and flexible ceramic substrates, all of which are candidate materials for vacuum web coating processes. Similarly, developments in applications including flexible electronics have led to new and more stringent processing requirements. These include particle management, substrate interleaves, thermal control, and increasingly complex multi-layered products which are often most efficiently produced by using different deposition techniques in a single web coater. In 2014, Intellivation developed the R2R series vacuum web coating tool platform to address these challenges. This paper reviews the modular equipment design and presents case study data from the R2R330 at the Intellivation Application Lab in Fort Collins, Colorado.

October 15-17, 2017

Intellivation exhibits at the 2017 AIMCAL R2R Conference in Tampa, Florida.  Come say hello to learn about the latest in roll to roll vacuum deposition equipment, automation, and processing techniques.  New for 2017, the Intellivation Application Lab is equipped with an R2R330 machine for customer demonstrations and product development.