Intellivation exhibits at the 2019 Rocky Mountain Chapter AVS (RMCAVS) Annual Symposium. Intellivation President Mike Simmons has served on the board of RMCAVS since 2013. Stop by the Intellivation exhibit to learn about the latest innovations in roll to roll vacuum coating equipment technology, high utilization sputter magnetrons, substrate pretreatments including glow discharge sources, and the latest happenings in the Intellivation roll to roll thin film deposition application lab.
Mike Simmons presents on In-House Application Lab work for Transparent Ultrabarrier films and High Power Impulse Magnetron Sputtering (HIPIMS)
Intellivation President Mike Simmons presents on work recently completed in the Intellivation Application Lab relating to Transparent Ultrabarrier films and High Power Impulse Magnetron Sputtering (HIPIMS). The presentation title is:
Improved coating properties of Cu and TiO2 coatings on PET web via High Power Impulse Magnetron Sputtering (HIPIMS) with positive voltage reversal.
The full abstract is:
As industries such as wearable devices and flexible electronics develop, new technologies are required in order to deposit high quality coatings on insulating and temperature sensitive substrates. Roll to roll web coating is frequently used to deposit coatings on polymer and glass web. High Power Impulse Magnetron Sputtering (HIPIMS) has shown many advantages over conventional magnetron sputtering which is commonly used to deposit metals, metal nitrides and metal oxides on polymer web. With HIPIMS, a fraction of the target material will be ionized while the ion energy distribution function will shift to energies about 10 times greater than those for DC discharges. However, this increase in ionization and energy will give only modest changes in coating properties on an unbiased substrate. With the addition of a positive voltage reversal pulse adjacent to the negative HIPIMS sputtering pulse, these ions can be accelerated towards the substrate providing energy for film nucleation and densification. In this study, an industrial scale (330 mm wide web) web coater was used to deposit TiO2 and Cu coatings as well as other metal nitride and metal oxide coatings on PET at room temperature. Increases in film density and changes in grain size can be clearly seen compared to DC or pulsed DC sputtering. The effect on the index of refraction, extinction coefficient and barrier properties are also investigated.
Authors: Mike Simmons, Frank Papa, Ivan Fernandez Martinez, Ambiorn Wennberg
Presenter: Mike Simmons
Intellivation exhibits at the 2019 Society of Vacuum Coaters (SVC) TechCon in Long Beach, California
Intellivation exhibits at the 2019 Society of Vacuum Coaters (SVC) TechCon in Long Beach, California. Visit our booth to learn more about the latest innovations in high volume manufacturing of roll to roll sputtered films and high utilization linear magnetrons.
Intellivation exhibits at the 40th Annual Northern California Chapter AVS (NCCAVS) Equipment Exhibition in San Jose, California
Intellivation exhibits at the 40th Annual Northern California Chapter AVS (NCCAVS) Equipment Exhibition in San Jose, California. Visit the Intellivation booth to learn more about the latest innovations in roll to roll magnetron sputtering technology and equipment for use in today’s demanding applications including high throughput hybrid flexible electronics manufacturing equipment.
Mike Simmons Presents at the 2018 AIMCAL R2R Conference on Coating Properties Deposited by High Power Impulse Magnetron Sputtering
Intellivation President Mike Simmons and GP Plasma President Frank Papa Present at the 2018 AIMCAL R2R Conference, giving a paper entitled Coating Properties of Cu and TiO2 on Polymer Web Deposited by High Power Impulse Magnetron Sputtering With and Without Positive Voltage Reversal and Pulsed DC
The full abstract of the presentation is:
Improving the coating properties such as sheet resistance for copper and the index of refraction and structure for TiO2 are an important topic for low temperature coating on polymer web. Both types of coatings can be deposited by pulsed DC, but little can be done to influence the material properties as the energy of the deposited species is relatively low (around 5 eV). HIPIMS has been shown to increase both the ion fraction and energy of the sputtered species. Ion fractions range from 10-90% depending on the target material and the energy of both gas and metal ions can reach up to 50eV. By adding a positive voltage reversal pulse adjacent to the negative sputtering pulse, the metal and gas ions can be accelerated towards the substrate to influence the coating properties. This repulsion of ions from the target during the positive reversal pulse also results in an increase in deposition rate of up to 30% over conventional HIPIMS sputtering. In this study, we will examine thermal loading and deposition rate as well as the optical, electrical and morphologic properties of Cu and TiO2. All experiments are carried out on an industrial web coater.
Authors: Frank Papa, Mike Simmons, Ivan Fernandez Martinez
Presenters: Frank Papa, Mike Simmons
Intellivation exhibits at the 2018 Association of International Metalizers, Coaters, and Laminators (AIMCAL) R2R Conference in Phoenix, AZ
Intellivation exhibits at the 2018 Association of International Metalizers, Coaters, and Laminators (AIMCAL) R2R Conference in Phoenix Arizona. Intellivation president Mike Simmons serves as the AIMCAL Vacuum Web Coating committee co-chair to help seek out the best technical papers in emerging technology areas such as thin film batteries, roll to roll optical coatings, flexible electronics manufacturing, large area roll to roll sputter deposition, and flexible medical devices, in order to put on a strong technical program in the vacuum web coating track. Please visit the conference to learn more about these exciting technology areas, and while you are here visit the Intellivation exhibit to learn more about our reel to reel vacuum deposition equipment for Production, Pilot, and R&D, and our on-site thin film coating development laboratory.
Intellivation exhibits at the 2018 Rocky Mountain Chapter AVS (RMCAVS) Annual Symposium. Intellivation President Mike Simmons has served on the board of RMCAVS since 2013, and in 2018 he serves as the Chair. Stop by the Intellivation exhibit to discuss how we can be of assistance with your roll to roll sputtering equipment needs.
Intellivation exhibits at the 2018 Society of Vacuum Coaters TechCon in Orlando, Florida. Come visit us at booth 516 to learn more about the innovative R2R series modular roll to roll vacuum coating equipment line. Handling substrates including flexible ceramics, ultrathin polymers, metal foils, textiles, and others; and depositing many materials including any conductive material, oxides and nitrides of any conductive material, organic materials, and others, the R2R series is a very powerful platform for use in developing and manufacturing today’s demanding high tech products.
Intellivation exhibits at the 39th Annual NCCAVS Equipment Exhibition in San Jose, CA. Come visit us at booth 89 to learn about the latest in roll to roll vacuum deposition equipment for applications from energy storage and flexible electronics to medical and security, and beyond.
Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2018 FLEX Conference in Monterey, California
Intellivation President Mike Simmons presents Modular R2R Vacuum Coating System Platform for Pilot Scale Development and Production at the 2018 FLEX Conference in Monterey, California. The presentation abstract is:
Advances in high volume manufacturing technology have led to commercial production of ever-thinner polymer substrates and to the emergence of flexible glass and flexible ceramic substrates, all of which are candidate materials for vacuum web coating processes. Similarly, developments in applications including flexible electronics have led to new and more stringent processing requirements. These include particle management, substrate interleaves, thermal control, and increasingly complex multi-layered products which are often most efficiently produced by using different deposition techniques in a single web coater. In 2014, Intellivation developed the R2R series vacuum web coating tool platform to address these challenges. This paper reviews the modular equipment design and presents case study data from the R2R330 at the Intellivation Application Lab in Fort Collins, Colorado.