Mike Simmons Presents at the 2018 AIMCAL R2R Conference on Coating Properties Deposited by High Power Impulse Magnetron Sputtering

by | Oct 31, 2018

Intellivation President Mike Simmons and GP Plasma President Frank Papa Present at the 2018 AIMCAL R2R Conference, giving a paper entitled Coating Properties of Cu and TiO2 on Polymer Web Deposited by High Power Impulse Magnetron Sputtering With and Without Positive Voltage Reversal and Pulsed DC

The full abstract of the presentation is:

Improving the coating properties such as sheet resistance for copper and the index of refraction and structure for TiO2 are an important topic for low temperature coating on polymer web. Both types of coatings can be deposited by pulsed DC, but little can be done to influence the material properties as the energy of the deposited species is relatively low (around 5 eV). HIPIMS has been shown to increase both the ion fraction and energy of the sputtered species. Ion fractions range from 10-90% depending on the target material and the energy of both gas and metal ions can reach up to 50eV. By adding a positive voltage reversal pulse adjacent to the negative sputtering pulse, the metal and gas ions can be accelerated towards the substrate to influence the coating properties. This repulsion of ions from the target during the positive reversal pulse also results in an increase in deposition rate of up to 30% over conventional HIPIMS sputtering. In this study, we will examine thermal loading and deposition rate as well as the optical, electrical and morphologic properties of Cu and TiO2. All experiments are carried out on an industrial web coater.

Authors: Frank Papa, Mike Simmons, Ivan Fernandez Martinez

Presenters: Frank Papa, Mike Simmons

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